Abstract
Abstract
MEMS sensors and actuators play an increasing role for high volume markets such as automobile or consumer products. In that field, LETI has one of the most important research activity in Europe. Today, almost 100 people work on the different MEMS development stages, for mechanic and electronic designs, process integration, characterizations and reliability studies. Since the beginning of these activities in the 80’s, many industrial transfers have been successfully carried out. We propose in that article to present briefly the evolution of the MEMS activities during the last 25 years, with an emphasis on the new developments and future trends. A special attention is also given to detail the recent evolutions of Leti organisation in MEMS activities to answer with a high reactivity to industrial needs.