Abstract
Abstract
Low Temperature Cofired Ceramics (LTCC) -Technology was developed to manufacture multilayer packages for electronic components. Because of the high temperature stability, the positive high frequency characteristics and the high reliability LTCC is very suited for automotive applications. Furthermore there is the possibility of the integration of 3-dimensional structures (cavities, membrans, chambers, channels) in a simple way to set up ceramic microsystems. Specific LTCC-compatible screen printed thick films can act as sensors or actuators. One example of a mechanical sensor is a pressure-detecting sensor. The present paper describes the development of piezoresistive pressure sensors in LTCC-technology.