Abstract
KEYWORDS – six axis force torque, MEMS strain gauge, elastic structure, piezoresistive, human interface
ABSTRACT
A six axis force torque sensor is based on a principle of detecting deformation of an elastic structure in a sensor that occurs due to force required to measure force and torque. To detect deformation occurring in the elastic structure, a method of using a strain gauge has been developed. At present, the six axis force torque sensor requires 10 to 20 strain gauges and calibration for each sensor, and therefore is expensive. A method of measuring deformation using a MEMS(Micro Electro Mechanical Systems) strain gauge has been researched. In this paper, the six axis force torque sensor is developed by using piezoresistive MEMS strain gauge. The elastic structure of the sensor is optimally designed to produce maximum strain. Then the six axis force torque sensor is fabricated by attaching two MEMS strain gauges on the both side of elastic structure. Finally the performance test of the developed sensor is carried out.